Nanofilms: Fundamental Principles, Methods for Studying Structure and Properties, Applications


Filipp V. Kiryukhantsev-Korneev

Mikhail I. Petrzhik

Alexander S. Rogachev

Brief content

Nanofilms for various tribological applications (cutting tools, press-forming tools, load-bearing components, etc) are of interest because of their remarkable combination of properties such as high hardness, appropriate stiffness, thermal stability, high fracture toughness, low wear and friction, impact- and corrosion-resistance. The current topics related to the deposition, characterization, and testing of nanofilms are review. The problems and methods of their solving are considered related to the analysis of the structure in the nanometric scale (crystallite size, phase composition, atomic structure of the grain boundaries, defect structure, and orientation relationships) and the evaluation of the processing-structure-properties relationships. As examples, various groups of films for mechanical engineering and medicine are considered.

Course content


  1. Nanomaterials. Formation of nanostructured state by PVD and CVD processes (8 h)
  2. Formation, specific structure and properties of nanostructured films. Petch-Hall law (6 h)
  3. Mechanisms of film growth/ Epitaxial growth. Superlattice films: Deposition and properties (4 h)
  4. X-ray diffraction and transmission electron microscopy (4 h)
  5. Glow discharge optical emission spectroscopy (4 h)
  6. X-ray photoelectron spectroscopy. Auger-electron spectroscopy. Raman and Infra-red spectroscopy. Energy- dispersive spectroscopy (6 h)
  7. Express-methods for thin films diagnostics (2 h)


Main textbooks:

  1. Micro-and opto-electronic materials and structures: physics, mechanics, design, reliability, packaging / Ed. by Suhir E. — Вerlin: Springer Science+Business Media, Inc. Vol.1. Materials physics — materials mechanics. Vol. II Physical Design — Reliability and Packaging — 2007., 725 p. — ISBN: 978-0-387-2794-0.

Additional literature:

  1. Thomas Nelis & Richard Payling. Glow Discharge Optical Emission Spectroscopy. RCS Analytical. 2003. 224p.